Determination of the model for the chemical structure of porous PECVD low-k films

Verdonck, PatrickPatrickVerdonckLe, Quoc ToanQuoc ToanLeDevonport, JoshuaJoshuaDevonportHuanca, DaniloDaniloHuancaGomes dos Santos Filho, SebastiaoSebastiaoGomes dos Santos FilhoConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautBaklanov, MikhaïlMikhaïlBaklanovVan Elshocht, SvenSvenVan Elshocht2021-10-232021-10-2320152162-8769https://imec-publications.be/handle/20.500.12860/26125Determination of the model for the chemical structure of porous PECVD low-k filmsJournal articlehttp://jss.ecsdl.org/content/4/1/N3140.abstract