Herms, MartinMartinHermsWagner, MatthiasMatthiasWagnerDe Messemaeker, JokeJokeDe MessemaekerDe Wolf, IngridIngridDe Wolf2021-10-242021-10-2420171610-1634https://imec-publications.be/handle/20.500.12860/28490A photo-elastic microscopy study of the temperature dependecy of stress induced by through silicon vias in siliconJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201700028/full