Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannKittl, JorgeJorgeKittlDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsD'Haen, JanJanD'HaenD'Olieslaeger, MarcMarcD'OlieslaegerVan Bael, MarliesMarliesVan BaelVan den Rul, HHVan den RulMullens, JJMullens2021-10-182021-10-1820101359-6454https://imec-publications.be/handle/20.500.12860/17225Strontium niobate high-k dielectrics: Film deposition and material propertiesJournal article