Optimization of vertical carbon nanotube interconnects using the direct electrical comparison of integration steps

van der Veen, MarleenMarleenvan der VeenBarbarin, YohanYohanBarbarinBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-222021-10-222014-11https://imec-publications.be/handle/20.500.12860/24682Optimization of vertical carbon nanotube interconnects using the direct electrical comparison of integration stepsProceedings paperhttp://imnc.jp/invited2014.html