70 GHz, 2 A/W, Waveguide-Coupled Germanium-in-Silicon Avalanche Photodiode

Shahin, AmirAmirShahinCoughlan, ConorConorCoughlanBerciano, MathiasMathiasBercianoYudistira, DiditDiditYudistiraKaushik, ShuchiShuchiKaushikLoo, RogerRogerLooKobbi, HakimHakimKobbiCarolan, PatrickPatrickCarolanAgati, MartaMartaAgatiVan Thourhout, DriesDriesVan ThourhoutVerheyen, PeterPeterVerheyenChakrabarti, MaumitaMaumitaChakrabartiBan, YoojinYoojinBanVelenis, DimitriosDimitriosVelenisFerraro, FilippoFilippoFerraroVan Campenhout, JorisJorisVan CampenhoutShahinor, AmirAmirShahinor2026-05-042026-05-042025979-8-3315-9532-6https://imec-publications.be/handle/20.500.12860/59297In this work, we report a waveguide Ge/Si avalanche photodetector achieving high 3dB-bandwidths of 70 GHz and 50 GHz at an O-band responsivity of 2 A/W and 3.6 A/W, respectively, combined with sub- μA dark current performance in a simple, Si-contacted lateral diode design.eng70 GHz, 2 A/W, Waveguide-Coupled Germanium-in-Silicon Avalanche PhotodiodeProceedings paper10.1109/ecoc66593.2025.11263307WOS:001680185000385