Le, Quoc ToanQuoc ToanLeWhelan, CarolineCarolineWhelanStruyf, HerbertHerbertStruyfVanhaelemeersch, SergeSergeVanhaelemeerschAzioune, A.A.AziouneLouette, P.P.LouettePireaux, J-JJ-JPireauxMaex, KarenKarenMaex2021-10-152021-10-152004-10https://imec-publications.be/handle/20.500.12860/9187Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosimetry study.Journal article