Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues

Krishtab, MikhailMikhailKrishtabde Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-242021-10-2420170003-6951https://imec-publications.be/handle/20.500.12860/28713Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residuesJournal articlehttp://aip.scitation.org/doi/full/10.1063/1.4973474