Vos, IngridIngridVosPeeters, StefanStefanPeetersVerbeeck, RitaRitaVerbeeckBoullart, WernerWernerBoullartVertommen, JohanJohanVertommen2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14764Confined chemical cleaning: a novel concept evaluated for front end of line applicationsProceedings paper