Viapiana, MatteoMatteoViapianaXu, ZhenZhenXuGoux, LudovicLudovicGouxKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroesenekenWouters, DirkDirkWouters2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9880Optimization of the ferroelectric film for application in scaled FeFETOral presentation