Application of surface and interface characterization of materials in back-end-of-line interconnect

Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33385Application of surface and interface characterization of materials in back-end-of-line interconnectMeeting abstract