Vandervorst, WilfriedWilfriedVandervorstKambham, Ajay KumarAjay KumarKambhamKumar, ArulArulKumarGilbert, MatthieuMatthieuGilbert2021-10-212021-10-2120130304-3991https://imec-publications.be/handle/20.500.12860/232863D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomographyJournal article