Witvrouw, AnnAnnWitvrouwProost, JorisJorisProostRoussel, PhilippePhilippeRousselCosemans, P.P.CosemansMaex, KarenKarenMaex2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4031Stress relaxation in Al-Cu and Al-Si-Cu thin filmsJournal article