Silicon surface roughening mechanisms in ammonia hydrogen peroxide mixtures

Knotter, D. M.D. M.KnotterDe Gendt, StefanStefanDe GendtMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4486Silicon surface roughening mechanisms in ammonia hydrogen peroxide mixturesJournal article