Quantification of process-induced damage in highly-scaled pMTJ devices for MRAM applications

Rao, SiddharthSiddharthRaoPerumkunnil, ManuManuPerumkunnilKundu, ShreyaShreyaKunduSouriau, LaurentLaurentSouriauSwerts, JohanJohanSwertsCouet, SebastienSebastienCouetYasin, FarrukhFarrukhYasinKim, WoojinWoojinKimTsvetanova, DianaDianaTsvetanovaJossart, NicoNicoJossartCrotti, DavideDavideCrottiFurnemont, ArnaudArnaudFurnemontKar, Gouri SankarGouri SankarKar2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31627Quantification of process-induced damage in highly-scaled pMTJ devices for MRAM applicationsProceedings paperhttp://www.icm2018sf.org/doc/ICM18_Abs_Indx_FINAL_1.pdf