Acoustic meta-materials in MEMS bar resonators

Rottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansenZhang, YuchenYuchenZhangCoosemans, AdriaanAdriaanCoosemansDelcour, GilGilDelcourHerdewyn, KatrienKatrienHerdewynVanpaemel, JohannesJohannesVanpaemelVan Hoof, ChrisChrisVan HoofTilmans, HarrieHarrieTilmans2021-10-182021-10-182010-02https://imec-publications.be/handle/20.500.12860/17913Acoustic meta-materials in MEMS bar resonatorsProceedings paper