Duan, M.M.DuanZhang, J. F.J. F.ZhangJi, Z.Z.JiZhang, W. D.W. D.ZhangKaczer, BenBenKaczerDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroeseneken2021-10-212021-10-2120130018-9383https://imec-publications.be/handle/20.500.12860/22288New insights into defect loss, slowdown, and device lifetime enhancementJournal article