Vaglio Pret, AlessandroAlessandroVaglio PretKocsis, MichaelMichaelKocsisDe Simone, DaniloDaniloDe SimoneVandenberghe, GeertGeertVandenbergheStowers, JasonJasonStowersGiglia, AngeloAngeloGigliaDe Schepper, PeterPeterDe SchepperMani, AntonioAntonioManiBiafore, John J.John J.Biafore2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27421Characterizing and modeling electrical response to light for metal based EUV photoresistsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2508622