Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance

Van Hoof, RitaRitaVan HoofBryce, GeorgeGeorgeBryceClaes, GertGertClaesWitvrouw, AnnAnnWitvrouwSeveri, SimoneSimoneSeveri2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18191Enabling poly- SiGe MEMS scaling by improving anchor strength and resistanceOral presentation