Optimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications

Gonzalez, PilarPilarGonzalezHaspeslagh, LucLucHaspeslaghDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17166Optimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applicationsProceedings paper