Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits

Selvaraja, ShankarShankarSelvarajaSchaekers, MarcMarcSchaekersBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan Thourhout2021-10-222021-10-2220140030-4018https://imec-publications.be/handle/20.500.12860/24507Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuitsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0030401813009504