van Dorp, DennisDennisvan DorpCuypers, DanielDanielCuypersArnauts, SophiaSophiaArnautsMertens, PaulPaulMertensDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23247Cleaning of III-V materials: surface chemistry considerationsProceedings paper