The analysis of ultra-thin films with HRBS-30

Brijs, BertBertBrijsKimura, KenjiKenjiKimuraSchiettekatte, FrancoisFrancoisSchiettekatteSajavaara, TimoTimoSajavaaraVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16802The analysis of ultra-thin films with HRBS-30Proceedings paper