Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modeling

De Wolf, IngridIngridDe WolfSenez, VVSenezBalboni, R.R.BalboniArmigliato, A.A.ArmigliatoFrabboni, S.S.FrabboniCedola, A.A.CedolaLagomarsino, S.S.Lagomarsino2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7466Techniques for mechanical strain analysis in submicron structures: TEC/CBED, micro-Raman spectroscopy, X-ray microdiffraction and modelingJournal article