Volders, HennyHennyVoldersRichard, OlivierOlivierRichardCarbonell, LaureLaureCarbonellPalmans, RogerRogerPalmansVerdonck, PatrickPatrickVerdonckHeylen, NancyNancyHeylenKellens, KristofKristofKellensArmini, SilviaSilviaArminiBender, HugoHugoBenderZhao, LarryLarryZhaoTokei, ZsoltZsoltTokei2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16503Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nmProceedings paper