Enabling the high-performance InGaAs/Ge CMOS: a common gate stack solution

Lin, DennisDennisLinBrammertz, GuyGuyBrammertzSioncke, SonjaSonjaSionckeFleischmann, ClaudiaClaudiaFleischmannDelabie, AnneliesAnneliesDelabieMartens, KoenKoenMartensBender, HugoHugoBenderConard, ThierryThierryConardTseng, JoshuaJoshuaTsengLin, VicVicLinWang, Wei-EWei-EWangTemst, KristiaanKristiaanTemstVantomme, AndreAndreVantommeMitard, JeromeJeromeMitardCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15723Enabling the high-performance InGaAs/Ge CMOS: a common gate stack solutionProceedings paper