Chen, AoAoChenFoong, Yee MeiYee MeiFoongThaler, ThomasThomasThalerButtgereit, UteUteButtgereitChung, AngelineAngelineChungBurbine, AndrewAndrewBurbineSturtevant, JohnJohnSturtevantClifford, ChrisChrisCliffordAdam, KostasKostasAdamDe Bisschop, PeterPeterDe Bisschop2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28006Effective use of aerial image metrology for calibration of OPC modelsProceedings paper10.1117/12.2258632