Lisoni, JuditJuditLisoniWafer, K.K.WaferJohnson, J.A.J.A.JohnsonGoux, LudovicLudovicGouxSchwitters, M.M.SchwittersParaschiv, VasileVasileParaschivMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghCaputa, ConcettaConcettaCaputaZambrano, R.R.ZambranoWouters, DirkDirkWouters2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9213Stress evolution in integrated SrBi2Ta2O9 ferroelectric layersProceedings paper