Enhanced photoelectrochemical activity of GaN by dry etching into nanopillar array

Tseng, PeterPeterTsengMehta, BharatBharatMehtavan Dorp, DennisDennisvan DorpLieten, RubenRubenLietenVereecken, PhilippePhilippeVereeckenBorghs, GustaafGustaafBorghs2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23192Enhanced photoelectrochemical activity of GaN by dry etching into nanopillar arrayProceedings paperhttp://ecst.ecsdl.org/content/53/9/29.short