High-alignment-accuracy transfer printing of passive silicon waveguide structures

Ye, NanNanYeMuliuk, GrigorijGrigorijMuliukTrindade, Antonio joseAntonio joseTrindadeBower, ChrisChrisBowerZhang, JingJingZhangUvin, SarahSarahUvinVan Thourhout, DriesDriesVan ThourhoutRoelkens, GuntherGuntherRoelkens2021-10-262021-10-262018-011094-4087https://imec-publications.be/handle/20.500.12860/32331High-alignment-accuracy transfer printing of passive silicon waveguide structuresJournal articlehttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-26-2-2023