Wet-chemical etching of InGaAs for advanced CMOS processing

van Dorp, DennisDennisvan DorpArnauts, SophiaSophiaArnautsCuypers, DanielDanielCuypersRip, JensJensRipHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23245Wet-chemical etching of InGaAs for advanced CMOS processingProceedings paperhttp://ecst.ecsdl.org/content/58/6/281.abstract