Mallik, ArindamArindamMallikRyckaert, JulienJulienRyckaertKim, Ryan Ryoung hanRyan Ryoung hanKimDebacker, PeterPeterDebackerDecoster, StefanStefanDecosterLazzarino, FredericFredericLazzarinoRitzenthaler, RomainRomainRitzenthalerHoriguchi, NaotoNaotoHoriguchiVerkest, DiederikDiederikVerkestMocuta, AndaAndaMocuta2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33524Economics of semiconductor scaling – a cost analysis for advanced technology nodeProceedings paper