Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters

Zhang, YirenYirenZhangUmeda, ToruToruUmedaSakakibara, HirokazuHirokazuSakakibaraIbrahim, Sheik Ansar UsmanSheik Ansar UsmanIbrahimSakamoto, AtsushiAtsushiSakamotoSingh, AmarnauthAmarnauthSinghShick, RobertRobertShickSkjonnemand, KarlKarlSkjonnemandFoubert, PhilippePhilippeFoubertDrent, WautWautDrent2024-03-252023-07-282024-03-252023978-1-5106-6103-50277-786XWOS:001022961000050https://imec-publications.be/handle/20.500.12860/42240Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filtersProceedings paper10.1117/12.2660389978-1-5106-6104-2WOS:001022961000050