Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

Arstila, KaiKaiArstilaHantschel, ThomasThomasHantschelKleindiek, StephanStephanKleindiekSterr, JochenJochenSterrVaquette, QuentinQuentinVaquetteDemeulemeester, CindyCindyDemeulemeesterVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16673Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscopeJournal article