Heterogeneous Integration of Uni-Travelling-Carrier Photodiodes using Micro-Transfer-Printing on a Silicon-Nitride Platform

Maes, DennisDennisMaesRoelkens, GuntherGuntherRoelkensZaknoune, MohammedMohammedZaknounePeytavit, EmilienEmilienPeytavitOp de Beeck, CamielCamielOp de BeeckPoelman, StijnStijnPoelmanBillet, MaximilienMaximilienBilletMuneeb, MuhammadMuhammadMuneebLemey, SamSamLemeyKuyken, BartBartKuyken2022-03-162022-03-162021naWOS:000728078301099https://imec-publications.be/handle/20.500.12860/39471Heterogeneous Integration of Uni-Travelling-Carrier Photodiodes using Micro-Transfer-Printing on a Silicon-Nitride PlatformProceedings paper10.1109/CLEO/Europe-EQEC52157.2021.9542787978-1-6654-1876-8WOS:000728078301099