Rochus, VeroniqueVeroniqueRochusJansen, RoelofRoelofJansenGoyvaerts, JeroenJeroenGoyvaertsVandenboch, GuyGuyVandenbochvan de Voort, BobBobvan de VoortNeutens, PieterPieterNeutensO'Callaghan, JohnJohnO'CallaghanTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27222Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platformProceedings paper