Heyns, MarcMarcHeynsBeckx, StephanStephanBeckxBender, HugoHugoBenderBlomme, PieterPieterBlommeBoullart, WernerWernerBoullartBrijs, BertBertBrijsCarter, RichardRichardCarterCaymax, MattyMattyCaymaxClaes, MartineMartineClaesConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtDegraeve, RobinRobinDegraeveDelabie, AnneliesAnneliesDelabieDeweerd, WimWimDeweerdGroeseneken, GuidoGuidoGroesenekenHenson, KirklenKirklenHensonKauerauf, ThomasThomasKaueraufKubicek, StefanStefanKubicekLucci, LucaLucaLucciLujan, GuilhermeGuilhermeLujanMentens, JimmyJimmyMentensPantisano, LuigiLuigiPantisanoPetry, JasmineJasminePetryRichard, OlivierOlivierRichardRöhr, ErikaErikaRöhrSchram, TomTomSchramVandervorst, WilfriedWilfriedVandervorstVan Doorne, PatrickPatrickVan DoorneVan Elshocht, SvenSvenVan ElshochtWestlinder, JörgenJörgenWestlinderWitters, ThomasThomasWittersZhao, ChaoChaoZhaoCartier, EduardEduardCartierChen, JerryJerryChenCosnier, VincentVincentCosnierGreen, MartinMartinGreenJang, Se AugSe AugJangKaushik, VidyaVidyaKaushikKerber, AndreasAndreasKerberKluth, JonJonKluthLin, StevenStevenLinTsai, WilmanWilmanTsaiYoung, EdwardEdwardYoungManabe, YukikoYukikoManabeShimamoto, YasuhiroYasuhiroShimamotoBajolet, PhilippePhilippeBajoletDe Witte, HildeHildeDe WitteMaes, JanJanMaesDate, LucienLucienDatePique, DidierDidierPiqueCoenegrachts, BartBartCoenegrachtsVertommen, JohanJohanVertommenPassefort, SophieSophiePassefort2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7649Scaling of high-k dielectrics towards sub-1nm EOTProceedings paper