The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

Celano, UmbertoUmbertoCelanoChintala, Ravi ChandraRavi ChandraChintalaAdelmann, ChristophChristophAdelmannRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22110The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFMProceedings paper