Structural and electrical characterization of carbon nanotube interconnects by combined transmission electron microscopy and scanning spreading resistance microscopy

Hantschel, ThomasThomasHantschelKe, XiaoxingXiaoxingKeChiodarelli, NicoloNicoloChiodarelliSchulze, AndreasAndreasSchulzeBender, HugoHugoBenderEyben, PierrePierreEybenBals, SaraSaraBalsVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19040Structural and electrical characterization of carbon nanotube interconnects by combined transmission electron microscopy and scanning spreading resistance microscopyProceedings paper