Influence of ultra low-k material properties on post direct CMP damage

Sinapi, FabriceFabriceSinapiTravaly, YoussefYoussefTravalyHeylen, NancyNancyHeylenVereecke, GuyGuyVereeckeBaklanov, MikhaïlMikhaïlBaklanovHernandez, Jose LuisJose LuisHernandezBeyer, GeraldGeraldBeyerLytle, SSLytleFischer, PPFischerCockburn, AACockburnSantoro, GGSantoroNguyen, OONguyen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12913Influence of ultra low-k material properties on post direct CMP damageMeeting abstract