Comparison between intrinsic and integrated reliability properties of low-k materials

Croes, KristofKristofCroesPantouvaki, MariannaMariannaPantouvakiCarbonell, LaureLaureCarbonellZhao, LarryLarryZhaoBeyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokei2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18753Comparison between intrinsic and integrated reliability properties of low-k materialsMeeting abstract