Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process

Rusu, CristinaCristinaRusuJansen, HenriHenriJansenGunn, RobertRobertGunn2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8095Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow processProceedings paper