Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection

Zheng, LiLiZhengWang, C.C.WangCai, D.D.CaiHuang, Y.Y.HuangAdi, K.K.AdiHong, Y.Y.HongChen, Y.Y.ChenZhou, G.G.ZhouArmini, SilviaSilviaArminiDe Gendt, StefanStefanDe GendtWang, ShouxuShouxuWangHe, WeiWeiHe2021-10-292021-10-2920201867-1070https://imec-publications.be/handle/20.500.12860/36411Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnectionJournal articlehttps://doi.org/10.1016/j.jtice.2020.07.004