Joa, GaehunGaehunJoaEdinger, PierrePierreEdingerBleiker, Simon J.Simon J.BleikerWang, XiaojingXiaojingWangTakabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariQuack, NielsNielsQuackJezzini, MoisesMoisesJezziniVerheyen, PeterPeterVerheyenStemme, GoranGoranStemmeBogaerts, WimWimBogaertsGylfason, Kristinn B.Kristinn B.GylfasonNiklaus, FrankFrankNiklaus2022-03-162022-03-162021978-1-5106-4217-10277-786XWOS:000672828700007https://imec-publications.be/handle/20.500.12860/39466Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMSProceedings paper10.1117/12.2582975978-1-5106-4218-8WOS:000672828700007