Wang, GangGangWangLeys, MaartenMaartenLeysNguyen, DuyDuyNguyenLoo, RogerRogerLooBrammertz, GuyGuyBrammertzRichard, OlivierOlivierRichardBender, HugoHugoBenderDekoster, JohanJohanDekosterMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsCaymax, MattyMattyCaymax2021-10-192021-10-1920100013-4651https://imec-publications.be/handle/20.500.12860/18329Selective area growth of InP in shallow trench isloated structures on off-axis Si (001) substratesJournal article