Chemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNES

Verleysen, EvelineEvelineVerleysenBender, HugoHugoBenderSchryvers, DominiqueDominiqueSchryversVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16483Chemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNESMeeting abstract