Trends and perspectives for electrical characterization and reliability assessment in advanced CMOS technologies

Groeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerMartens, KoenKoenMartens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17192Trends and perspectives for electrical characterization and reliability assessment in advanced CMOS technologiesProceedings paper