Zhang, FengFengZhangLiu, X.X.LiuJin, S.S.JinBender, HugoHugoBenderLou, N. Z.N. Z.LouWilson, Z. H.Z. H.Wilson2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3167Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopyJournal article