Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes

Hantschel, ThomasThomasHantschelSlesazeck, StefanStefanSlesazeckVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4418Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probesOral presentation