Quasi continuous A-SIN:H-PECVD system with high throughput rate for solar cell AR-coating

Schitthelm, F.F.SchitthelmVölk, P.P.VölkDekkers, HaroldHaroldDekkersSzlufcik, JozefJozefSzlufcik2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4729Quasi continuous A-SIN:H-PECVD system with high throughput rate for solar cell AR-coatingProceedings paper