Surface preparation and cleaning in back-end-of-line for advanced CMOS integrated circuit

Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersVereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22655Surface preparation and cleaning in back-end-of-line for advanced CMOS integrated circuitMeeting abstract